two layers

Two-layer radio

1 min read · Fri, Apr 27 2012

two layers Circuits MEMS fractal capacitors

Amro Elshurafa, et al., "Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications." Micro & Nano Letters 7 (5), 2012, 419. In this letter, we fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art singlelayer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S