MOM capacitors

Matching properties of femtofarad and sub-femtofarad MOM capacitors

1 min read · Tue, Apr 26 2016

Circuits MOM capacitors

Hesham Omran, et al., "Matching properties of femtofarad and sub-femtofarad MOM capacitors." IEEE Transactions on Circuits and Systems I 63 (6) ,2016, 763. Small metal-oxide-metal (MOM) capacitors are essential to energy-efficient mixed-signal integrated circuit design. However, only few reports discuss their matching properties based on large sets of measured data. In this paper, we report matching properties of femtofarad and sub-femtofarad MOM vertical-field parallel-plate capacitors and lateral-field fringing capacitors. We study the effect of both the finger-length and finger-spacing on